![](/img/cover-not-exists.png)
Substrate-Effect of Chemically Amplified Resist.
Mori, Shigeyasu, Adachi, Kouichirou, Fukushima, Takashi, Sato, YuichiVolume:
9
Year:
1996
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.9.601
File:
PDF, 826 KB
english, 1996