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Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films
Krause, Bärbel, Abadias, Gregory, Michel, Anny, Wochner, Peter, Ibrahimkutty, Shyjumon, Baumbach, TiloVolume:
8
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.6b12413
Date:
December, 2016
File:
PDF, 546 KB
english, 2016