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In-Situ Heating Observation for Formation Behavior of Polycrystalline Silicon Thin Films Fabricated Using Aluminum Induced Crystallization
Ikeda, Ken-ichi, Hirota, Takeshi, Fujimoto, Kensuke, Sugimoto, Youhei, Takata, Naoki, Ii, Seiichiro, Nakashima, Hideharu, Nakashima, HiroshiVolume:
71
Year:
2007
Journal:
Journal of the Japan Institute of Metals
DOI:
10.2320/jinstmet.71.158
File:
PDF, 980 KB
2007