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Excimer Laser Annealing of Hydrogen Modulation Doped a-Si Film
Heya, Akira, Matsuo, Naoto, Serikawa, Tadashi, Kawamoto, NaoyaVolume:
71
Year:
2007
Journal:
Journal of the Japan Institute of Metals
DOI:
10.2320/jinstmet.71.661
File:
PDF, 905 KB
2007