![](/img/cover-not-exists.png)
Determination of Real Substrate Temperature during Sputtering by Nanostructure Analysis of Phase Separating Cobalt-Indium Tin Oxide System
Echigoya, Jun-ichi, Adachi, YosukeVolume:
74
Year:
2010
Journal:
Journal of the Japan Institute of Metals
DOI:
10.2320/jinstmet.74.294
File:
PDF, 2.64 MB
2010