Direct Bonding of High Quality InP/Si and Its Application...

Direct Bonding of High Quality InP/Si and Its Application to Semiconductor Lasers.

Mori, Kazuo, Tokutome, Keiichi, Sugou, Shigeo
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Volume:
35
Year:
1996
Journal:
Materia Japan
DOI:
10.2320/materia.35.338
File:
PDF, 2.70 MB
1996
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