Characterization of Small Areas of Thin-Films by...

MATERIALS TRANSACTIONS 2002 Vol. 43; Iss. 3

Characterization of Small Areas of Thin-Films by Grazing-Exit Electron Probe X-ray Microanalysis

Tsuji, Kouichi, Spolnik, Zoya, Wagatsuma, Kazuaki, Saito, Kesami, Asami, Katsuhiko
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Volume:
43
Year:
2002
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.43.414
File:
PDF, 83 KB
english, 2002
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