Fine-Sized Etching of Flexible Substrates Using Nano Particle Deposition System (NPDS)
Song, Woojin, Kim, Yang-Hee, Kim, Min-Saeng, Ahn, Sung-Hoon, Lee, Caroline SunyongVolume:
51
Year:
2010
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.m2010221
File:
PDF, 1.44 MB
english, 2010