Effects of Molybdenum Microstructures on Sputtered Films

Effects of Molybdenum Microstructures on Sputtered Films

Chen, Jhewn-Kuang, Tsai, Bing-Hua, Huang, Hung-Shen
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Volume:
56
Year:
2015
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.m2014411
File:
PDF, 7.52 MB
english, 2015
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