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Effects of Dielectric-Layer Composition on Growth of Self-Formed Ti-Rich Barrier Layers in Cu(1 at%Ti)/Low-k Samples
Kohama, Kazuyuki, Ito, Kazuhiro, Tsukimoto, Susumu, Mori, Kenichi, Maekawa, Kazuyoshi, Murakami, MasanoriVolume:
49
Year:
2008
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.maw200809
File:
PDF, 310 KB
english, 2008