Direct Evidence of Polycrystalline Silicon Thin Films...

MATERIALS TRANSACTIONS 2008 Vol. 49; Iss. 4

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

Ii, Seiichiro, Hirota, Takeshi, Fujimoto, Kensuke, Sugimoto, Youhei, Takata, Naoki, Ikeda, Ken-ichi, Nakashima, Hideharu, Nakashima, Hiroshi
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Volume:
49
Year:
2008
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.mra2007312
File:
PDF, 232 KB
english, 2008
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