Microstructure and Electrical Property of Sputtered Cr-Mo...

Microstructure and Electrical Property of Sputtered Cr-Mo Thin Films

Murata, Hideo, Ohba, Takuya
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Volume:
49
Year:
2008
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.mrp2008206
File:
PDF, 207 KB
english, 2008
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