![](/img/cover-not-exists.png)
Growth Rate and Microstructure of Mo Film by Chemical-Vapour-Deposition
Yoshikawa, Noboru, Kikuchi, AtsushiVolume:
37
Year:
1996
Journal:
Materials Transactions, JIM
DOI:
10.2320/matertrans1989.37.283
File:
PDF, 1.11 MB
1996