Effect of Substrate Treatments on Resist Footing in Chemically Amplified System.
Kaimoto, Yuko, Otoguro, Akihiko, Oikawa, Akira, Tago, Kazuki, Usujima, Akihiro, Hanyu, IsamuVolume:
10
Year:
1997
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.10.451
File:
PDF, 904 KB
english, 1997