High Resolution X-ray Lithography: Features of Two-dimensional Patterning.
Chen, Y., Carcenac, F., Rousseaux, F., Haghiri, A.M., Launois, H.Volume:
10
Year:
1997
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.10.619
File:
PDF, 398 KB
english, 1997