Effects of Substrate Refrigeration on Plasma Polymerization...

Journal of Photopolymer Science and Technology 1999 Vol. 12; Iss. 1

Effects of Substrate Refrigeration on Plasma Polymerization with Fluorocarbons.

Yoshimura, Kikuko, Minaguchi, Takeshi, Nakano, Hirohiko, Tatsuta, Toshiaki, Tsuji, Osamu, Toyozawa, Keiko, Abe, Takeshi, Ogumi, Zempachi
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Volume:
12
Year:
1999
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.12.45
File:
PDF, 468 KB
english, 1999
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