Detection of Deposition Rate of Plasma-Polymerized Films...

Journal of Photopolymer Science and Technology 2000 Vol. 13; Iss. 1

Detection of Deposition Rate of Plasma-Polymerized Films with a Quartz Crystal Microbalance.

Kashima, Kazuya, Kashima, Kazuya, Hirokawah, Tomoya, Aizawa, Hidenobu, Han, Dae-Sang, Atthoff, Björn, Yoshimi, Yasuo, Yoshimoto, Minoru, Hirotsu, Toshihiro, Hilborn, Jöns
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Volume:
13
Year:
2000
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.13.33
File:
PDF, 340 KB
english, 2000
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