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Mass Spectrometric Characterization of Pulsed Inductively Coupled Plasmas for Deposition of Thin Polyethylene Glycol-like Polymer Films.
Shamamian, Vasgen A., Hinshelwood, David D., Guerin, Daniel C., Denes, Ferencz S., Manolache, SorinVolume:
14
Year:
2001
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.14.91
File:
PDF, 734 KB
english, 2001