Photolithographic Properties of Photosensitive Sol-gel...

Journal of Photopolymer Science and Technology 2002 Vol. 15; Iss. 1

Photolithographic Properties of Photosensitive Sol-gel Materials and Their Application to Optical Waveguides.

Tamaki, Kentarou, Utaka, Tomohiro, Takase, Hideaki, Eriyama, Yuichi, Ukachi, Takashi
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Volume:
15
Year:
2002
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.15.103
File:
PDF, 1.01 MB
english, 2002
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