Towards Surface Growth Lithography Using Polymer Bound...

Towards Surface Growth Lithography Using Polymer Bound Photoactive Acid Generators

Fresco, Zachary M., Fréchet, J.M.J.
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Volume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.23
File:
PDF, 552 KB
2003
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