Numerical Investigations on Requirements for BARC Materials...

Journal of Photopolymer Science and Technology 2005 Vol. 18; Iss. 5

Numerical Investigations on Requirements for BARC Materials for Hyper NA Immersion Lithography

Matsuzawa, Nobuyuki, Watanabe, Yoko, Thuunakart, Boontarika, Ozawa, Ken, Yamaguchi, Yuko, Ikeda, Rikio, Kawahira, Hiroichi
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Volume:
18
Year:
2005
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.18.587
File:
PDF, 522 KB
2005
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