Room-Temperature Nanoimprint Lithography Using...

Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film

Nakamatsu, Ken-ichiro, Matsui, Shinji
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Volume:
19
Year:
2006
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.19.389
File:
PDF, 1.29 MB
2006
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