![](/img/cover-not-exists.png)
Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film
Nakamatsu, Ken-ichiro, Matsui, ShinjiVolume:
19
Year:
2006
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.19.389
File:
PDF, 1.29 MB
2006