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Simulation of the Time Evolution Profiles in Nanoimprint Lithography
Tanabe, Toshiaki, Nishihata, Masaaki, Kawata, Hiroyuki, Hirai, YoshihikoVolume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.573
File:
PDF, 254 KB
english, 2007