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Deposition of SiO2 Thim Films by Atmospheric Pressure Glow Plasma on Polycarbonate
Masuda, Shohei, Tanaka, Kunihito, Kogoma, MasuhiroVolume:
21
Year:
2008
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.263
File:
PDF, 771 KB
2008