Surface Segregation Analysis of Hydrophobic Additive of...

Journal of Photopolymer Science and Technology 2008 Vol. 21; Iss. 5

Surface Segregation Analysis of Hydrophobic Additive of Non-topcoat Resist

Hagiwara, Takuya, Ishibashi, Takeo, Terai, Mamoru, Kumada, Teruhiko, Shirota, Naoko, Yokokoji, Osamu, Matsunobu, Takeshi, Man, Naoki, Yoshikawa, Kazuhiro, Tanahashi, Yusuke, Hanawa, Tetsuro
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Volume:
21
Year:
2008
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.647
File:
PDF, 571 KB
english, 2008
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