Synthesis of Novel .ALPHA.-Fluoroacrylates and Related Polymers for Immersion Lithography
Yamashita, Tsuneo, Kishikawa, Yousuke, Tanaka, Yoshito, Morita, Masamichi, Kanamura, Takashi, Aoyama, HirokazuVolume:
21
Year:
2008
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.673
File:
PDF, 387 KB
english, 2008