Impact of De-molding Force on Exposure Dosage in...

Journal of Photopolymer Science and Technology 2009 Vol. 22; Iss. 2

Impact of De-molding Force on Exposure Dosage in UV-Nanoimprint Process

Fujii, Noriyoshi, Tanabe, Toshiaki, Hirasawa, Tamano, Kawata, Hiroaki, Sakai, Nobuji, Hirai, Yoshihiko
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Volume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.181
File:
PDF, 246 KB
english, 2009
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