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Fabrication of Uniform Gratings on Composite Semiconductors Using UV Nanoimprint Lithography
Ishizuka, Shogo, Nakao, Masashi, Mashiko, Shinro, Mizuno, Jun, Shoji, ShuichiVolume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.213
File:
PDF, 1.33 MB
english, 2009