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Development of a Compact X-ray Source and Super-sensitization of Photo Resists for Soft X-ray Imaging
Gowa, Tomoko, Fukutake, Naoyuki, Hama, Yoshimasa, Hizume, Kentaro, Kashino, Takashi, Kashiwagi, Shigeru, Kuroda, Ryunosuke, Masuda, Akihiko, Ohshima, Akihiro, Saito, Taku, Sakaue, Kazuyuki, Shinohara,Volume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.273
File:
PDF, 453 KB
english, 2009