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Soft Baking Effect on Lithographic Performance by Positive Tone Photosensitive Polyimide
Yuba, Tomoyuki, Okuda, Ryoji, Tomikawa, Masao, Kim, Jae HyunVolume:
23
Year:
2010
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.23.775
File:
PDF, 336 KB
english, 2010