Important Challenge for Optical Lithography Extension utilizing Double Patterning Process
Yaegashi, Hidetami, Oyama, Kenichi, Yabe, Kazuo, Yamauchi, Shoichi, Hara, Arisa, Natori, SakuraokaVolume:
24
Year:
2011
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.24.491
File:
PDF, 1.02 MB
english, 2011