Theoretical Study of Ionization of Polymers for EUV Resist

Journal of Photopolymer Science and Technology 2012 Vol. 25; Iss. 1

Theoretical Study of Ionization of Polymers for EUV Resist

Endo, Masayuki, Tagawa, Seiichi
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Volume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.101
File:
PDF, 520 KB
english, 2012
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