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Fabrication of the Plasma-Chemical Indicator Strip for the Detection of Plasma Processing Effects
Ihara, Tatsuhiko, Katsura, Masato, Ohshiro, Seisaku, Nakamura, Keiko, Ito, SeishiroVolume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.539
File:
PDF, 2.46 MB
english, 2012