Fabrication of Micro Tube Array by Combining Positive with Negative Type Photoresists due to Solubility Difference in Developer
Otsuka, Kazutoshi, Takahashi, Kenta, Kawai, AkiraVolume:
26
Year:
2013
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.26.717
File:
PDF, 527 KB
english, 2013