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Approach for High Aspect Ratio Pattern Transfer by Nanoimprint Lithography using Mixture Polymers of Molecular Weights
Nishikura, Naoki, Kawata, Hiroaki, Hirai, YoshihikoVolume:
26
Year:
2013
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.26.97
File:
PDF, 1.27 MB
english, 2013