Approach for High Aspect Ratio Pattern Transfer by...

Approach for High Aspect Ratio Pattern Transfer by Nanoimprint Lithography using Mixture Polymers of Molecular Weights

Nishikura, Naoki, Kawata, Hiroaki, Hirai, Yoshihiko
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Volume:
26
Year:
2013
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.26.97
File:
PDF, 1.27 MB
english, 2013
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