Relationships between Stochastic Phenomena and Optical...

Journal of Photopolymer Science and Technology 2014 Vol. 27; Iss. 1

Relationships between Stochastic Phenomena and Optical Contrast in Chemically Amplified Resist Process of Extreme Ultraviolet Lithography

Kozawa, Takahiro, Santillan, Julius Joseph, Itani, Toshiro
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Volume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.11
File:
PDF, 165 KB
english, 2014
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