Enabled Scaling Capability with Self-aligned Multiple...

Journal of Photopolymer Science and Technology 2014 Vol. 27; Iss. 4

Enabled Scaling Capability with Self-aligned Multiple patterning process

Yaegashi, Hidetami, Oyama, Kenichi, Yamauchi, Shoichi, Hara, Arisa, Natori, Sakurako, Yamato, Masatoshi
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Volume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.491
File:
PDF, 3.82 MB
english, 2014
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