Release Property of HSQ Replica Mold Fabricated by Room Temperature Nanoimprinting with PDMS soft mold
Sugano, Norihiro, Okada, Makoto, Haruyama, Yuichi, Matsui, ShinjiVolume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.81
File:
PDF, 248 KB
english, 2014