Moving-mask Lithography for 3D Microstructure Molding

Journal of Photopolymer Science and Technology 2014 Vol. 27; Iss. 1

Moving-mask Lithography for 3D Microstructure Molding

Kato, Nobuhiro, Kai, Takahisa, Hirano, Masakazu
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Volume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.85
File:
PDF, 1.32 MB
english, 2014
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