Surface Evaluation of HSQ Containing PDMS Additive after...

Journal of Photopolymer Science and Technology 2015 Vol. 28; Iss. 4

Surface Evaluation of HSQ Containing PDMS Additive after Room-temperature Nanoimprinting

Sugano, Norihiro, Okada, Makoto, Haruyama, Yuichi, Matsui, Shinji
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Volume:
28
Year:
2015
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.28.551
File:
PDF, 602 KB
english, 2015
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