A novel electron beam resist system acid catalized...

Journal of Photopolymer Science and Technology 1992 Vol. 5; Iss. 1

A novel electron beam resist system acid catalized conversion of poly(di-t-butoxysiloxane) into glass.

SAKATA, MIWA, ITO, TOSHIO, KOSUGE, MAKI, YAMASHITA, YOSHIO
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Volume:
5
Year:
1992
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.5.181
File:
PDF, 362 KB
english, 1992
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