Deposition of SiNx thin films by atmospheric pressure glow discharge plasmas.
KOGOMA, M., KOIWA, K., OKAZAKI, S.Volume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.341
File:
PDF, 209 KB
english, 1994