Plasma polymerization of organosilicon compounds by the self-bias method.
HIRAIDE, TAKAO, YAMADA, HIDEOVolume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.345
File:
PDF, 257 KB
english, 1994