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Thickness changes during polysiloxane formation at irradiated surface of films bearing photoacid generating units.
SHIRAI, Masamitsu, SUMINO, Tomonobu, TSUNOOKA, MasahiroVolume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.41
File:
PDF, 176 KB
english, 1994