Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.
CHUNG, CHAN-MOON, KOO, DEOK-IL, AHN, KWANG-DUKVolume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.473
File:
PDF, 412 KB
english, 1994