Dual-mode Behavior of Vinyl Ether Functionalized Photoresist.
YAMAOKA, Tsuguo, KAMENOSONO, Kouji, MOON, Seongyun, NAITOH, Kazuhiko, KONDO, Syun-ichi, UMEHARA, AkiraVolume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.533
File:
PDF, 207 KB
english, 1994