Acid Labile Crosslinked Units: A new Concept for Deep-UV...

Journal of Photopolymer Science and Technology 1996 Vol. 9; Iss. 4

Acid Labile Crosslinked Units: A new Concept for Deep-UV Photoresists.

SCHACHT, HANS-THOMAS, MUENZEL, NORBERT, FALCIGNO, PASQUALE, HOLZWARTH, HEINZ, SCHNEIDER, JOSEF
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Volume:
9
Year:
1996
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.9.573
File:
PDF, 522 KB
english, 1996
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