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Special Issue of the Conferences ‘Smart Sensors, Actuators and MEMS’, ‘Cyber-Physical Systems’ and ‘Bio-MEMS and Medical Microdevices’ within the SPIE EUROPE ‘MICROTECHNOLOGIES’ Symposium Barcelona, Spain, 4–6 May 2015
Schmid, Ulrich, Sanchez-Rojas, Jose Luis, van den Driesche, Sander, Brama, Riccardo, Michel, BerndVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2967-3
Date:
July, 2016
File:
PDF, 404 KB
english, 2016