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Deposition and dielectric study as function of thickness of perovskite oxynitride SrTaO2N thin films elaborated by reactive sputtering
Marlec, F., Le Paven, C., Le Gendre, L., Benzerga, R., Cheviré, F., Tessier, F., Gam, F., Sharaiha, A.Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.10.053
Date:
October, 2016
File:
PDF, 4.60 MB
english, 2016