ScAlN MEMS Cantilevers for Vibrational Energy Harvesting...

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

Mayrhofer, P. M., Rehlendt, C., Fischeneder, M., Kucera, M., Wistrela, E., Bittner, A., Schmid, U.
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2614660
Date:
February, 2017
File:
PDF, 2.72 MB
english, 2017
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